• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
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  • 优先权
    • 专利摘要:
    According to various embodiments, an end block arrangement (100a, 700, 800) for rotatably mounting a tubular electrode in a process chamber can have the following: a receiving area (102) for receiving a bearing arrangement (200a, 600) which has a coupling area for coupling the tubular electrode; the bearing arrangement (200a, 600), the coupling area of which is supported by a sleeve (204) of the bearing arrangement (200a, 600), the sleeve (204) being inserted into the receiving area (102); the sleeve (204) being assembled from several segments, the outer surfaces of which form a jacket surface (204m) of the bearing arrangement (200a, 600) and of which at least two segments (204t, 204k) are formed from different materials; wherein the outer surfaces (214m, 224m) of the two segments (204t, 204k) are aligned with one another so that they are aligned with one another.
    公开号:BE1023630B1
    申请号:E2016/5320
    申请日:2016-05-04
    公开日:2017-05-19
    发明作者:Sebastian Siegert；Gerit Stude；Gerd Arnold
    申请人:Von Ardenne Gmbh；
    IPC主号:
    专利说明:

    End block assembly, bearing assembly and method of making a
    bearing arrangement
    The invention relates to an end block assembly, a bearing assembly and a method of manufacturing a bearing assembly.
    In general, electrodes can be used in coating technology for various processes and / or pretreatments. For example, in a sputtering process (also referred to as sputter deposition or sputter deposition), a tubular target (or tube cathode) may be used from which the coating material is sputtered, i. can be sputtered. In general, a tubular electrode (cathode and / or anode, may also be referred to as tube cathode) rotate during processing. This may, for example, enable a long-term stable process, e.g. a long-term stable coating process. When Magnetronsputtem (magnetic field assisted sputtering), for example, a tube cathode can be used, which rotates during the sputtering process, wherein within the tube cathode, a magnet assembly is arranged to influence a plasma formation and thus inter alia the sputtering rate and / or other process parameters of the sputtering process. Furthermore, a magnetron arrangement can also have a plurality of tube cathodes (tube targets), for example in a so-called double tube magnetron (a so-called RDM-rotatable dual magnetron).
    According to various embodiments, a bearing assembly is provided for rotatably supporting an electrode, wherein the bearing assembly, for example, allows a structure which allows easy maintenance and / or repair of the bearing assembly, or their wearing parts. Clearly, the bearing assembly can be replaced as a whole, so that the bearing assembly can be pre-assembled, which significantly shortens the maintenance time and reduces production loss. For example, a tube target for a magnetron can be mechanically rotatably mounted and electrically contacted by means of the bearing arrangement.
    According to various embodiments, an end block assembly is provided in which the bearing assembly is received. The end block assembly may be mounted in a process chamber and provide coolant supply and electrical power supply to supply the electrode with coolant and electrical energy. An end block arrangement, which ensures the power supply and / or the coolant supply in addition to the mechanical support, is also referred to as a media end block.
    Illustrated can by means of the bearing assembly (or by means of Endblockanordnung) a power supply (eg for providing a predetermined electrical potential to the tubular electrode), a cooling water supply (eg for cooling the tubular electrode) and / or a rotatable mounting of the tubular electrode (eg to homogeneously atomize the surface of a tubular magnetron target). For the electrical contacting of the bearing assembly in the Endblockanordnung low contact resistance is required, which makes special demands on the materials used and the geometric shape of the electrical contacts. Clearly, electrical contacts are required, which allow the largest possible contact area with the electrical power supply in the Endblockanordnung and have a low electrical resistance. The contacts are therefore usually made of a particularly conductive material and secured in a contact area (e.g., outside) on the bearing assembly. The contacts (also referred to as contact segments) can lead to an offset in the outer surface of the bearing assembly.
    Manufacturing tolerances on the contacts result in variations in the outer diameter of the bearing assembly which may overlap at an offset (i.e., a step) in the outer surface of the bearing assembly and tend to tilt the bearing assembly in the end block. This can lead to a blockage of the bearing assembly when inserted into the Endblockanordnung and also when pulling out of the Endblockanordnung. If the tilted bearing assembly can not be released again, pulling out the bearing assembly is impossible and the Endblockanordnung is unusable.
    The variations in the outer diameter of the bearing assembly also affect the contact area with which the bearing assembly is contacted by the electrical power lead in the end block assembly. Illustratively, the end block assembly does not or incompletely contact the bearing assembly if the inner diameter (electrical power lead) of the end block assembly on the electrical contacts is too large and / or the outer diameter of the bearing assembly is too small (i.e., they do not match).
    According to various embodiments, a bearing assembly is provided, which allows a simple and accurate installation or disassembly in the Endblockanordnung.
    According to various embodiments, a bearing assembly is provided which enables reliable contact with the end block assembly.
    According to various embodiments, the manufacturing costs and processing costs for the bearing assembly can be reduced because of semi-finished products (prefabricated workpieces) can be used.
    According to various embodiments, an end block assembly for rotatably supporting a tubular electrode in a process chamber may include: a receiving portion for receiving a bearing assembly having a coupling portion for coupling the tubular electrode; the bearing assembly, the coupling portion of which is supported by a sleeve of the bearing assembly (also referred to as the housing of the bearing assembly), the sleeve (e.g., a tubular support) being inserted into the receiving portion; the sleeve being composed of a plurality of segments (e.g., tubular segments) whose outer surfaces define a lateral surface of the bearing assembly and at least two segments of which are formed of different materials; wherein the outer surfaces of the two segments are aligned with each other so that they are aligned.
    Illustratively, the components of the bearing assembly, which serve for the rotatable storage and electrical contacting of the electrode, received in the sleeve. The sleeve illustratively forms the housing of the bearing assembly, which is made to fit the receiving area of the end block assembly so that the bearing assembly fits into the receiving area of the end block assembly.
    One of the two segments (also referred to as the contact segment) is illustratively used to contact the sleeve and the other of the two segments (also referred to as a carrier segment) is illustratively used for stiffening and stabilizing the sleeve.
    In other words, according to various embodiments, the sleeve is provided in such a way that an offset in the lateral surface which arises when the sleeve is joined is or is compensated.
    According to various embodiments, the two segments may be materially bonded together (e.g., glued, welded or soldered). Alternatively or additionally, the two segments may be positively connected (e.g., screwed) together.
    According to various embodiments, the end block assembly may further include a housing having an opening, wherein the opening forms the Aufhahmebereich.
    In order for the sleeve to be reliably inserted into the end block assembly, the aperture and sleeve are made with a slight clearance to each other, i. with a clearance fit. The less play the sleeve has in the end block arrangement, the more precisely the bearing of the sleeve takes place in the end block arrangement, whereby mechanical loads can be better distributed and unwanted relative movements of the sleeve in the end block arrangement can be avoided. The less play the sleeve has in the end block assembly, the greater the demands on the manufacturing tolerances with which the sleeve is made (i.e., the manufacturing tolerances should be as small as possible).
    According to various embodiments, the outer surfaces of the two segments are aligned with each other so that their manufacturing tolerances overlap one another, e.g. completely or partially.
    According to various embodiments, the end block assembly may further comprise a bearing unit inserted into the sleeve and having a bearing and a shaft rotatably supported by the bearing, the rotatably mounted shaft having the coupling portion.
    According to various embodiments, a segment of the plurality of segments (e.g., one of the two segments or another segment) of the sleeve may have a mounting structure for releasably securing the sleeve to the housing.
    According to various embodiments, the two segments may form a body of revolution, wherein the outer surfaces of the two segments extend parallel to the axis of rotation of the body of revolution. In other words, the sleeve may be cylindrical on the two segments, e.g. with a passage opening along the axis (corresponding to the axis of rotation) of the cylinder, wherein the outer surface of the cylinder forms the lateral surface of the sleeve.
    According to various embodiments, one segment of the two segments (the carrier segment) may comprise or be formed from a first material and the other segment of the two segments (the contact segment) may comprise or be formed from a second material.
    According to various embodiments, a fracture toughness of the first material may be greater than a fracture toughness of the second material. Alternatively or additionally, an electrical conductivity of the second material may be greater than an electrical conductivity of the first material. The fracture toughness and the electrical conductivity may be related to a temperature, e.g. Room temperature. The electrical conductivity can be specified for direct current.
    The first material may have as high a fracture toughness as possible (also referred to as fracture toughness), i. be particularly stable. The fracture toughness describes the resistance of a material to crack propagation (crack expansion). The greater the fracture toughness of a material, the more resilient the material can be before it fails.
    A ratio of the fracture toughness of the first material to the fracture toughness of the second material may be e.g. greater than about 100%, e.g. greater than about 150%, e.g. greater than about 200%, e.g. greater than about 300%, e.g. greater than about 400%, e.g. in a range of about 150% to about 500%.
    The fracture toughness of the first material may be greater than e.g. about 15 MPa m0.5, e.g. greater than about 20 MPa m0'5, e.g. greater than about 25 MPa m0.5, e.g. greater than about 30 MPa m0'5, e.g. greater than about 35 MPa m0.5, e.g. greater than about 40 MPa m0.5, e.g. greater than about 45 MPa m0.5, e.g. greater than about 50 MPa m0.5, e.g. greater than about 55 MPa m0.5, e.g. greater than about 60 MPa m0.5. For example, the fracture toughness may range from about 35 MPa m0.5 to about 65 MPa m0'5, e.g. in a range of about 45 MPa m0.5 to about 60 MPa m0 x 5.
    A ratio of the electrical conductivity of the second material to the electrical conductivity of the first material may be e.g. greater than about 100%, e.g. greater than about 150%, e.g. greater than about 200%, e.g. greater than about 300%, e.g. greater than about 400%, e.g. greater than about 500%, e.g. greater than about 600%, e.g. in a range of about 150% to about 700%.
    The second material may have an electrical conductivity (at room temperature) greater than about 6 Ω 1 m 1, e.g. greater than about 2 x 6 Ω-1 m ', e.g. greater than about 10ΙΟ6 Ω 'nf', e.g. greater than about 20 · ΙΟ6 Ω 'nf', e.g. of more than about 50 · ΙΟ6 Ω · nf1.
    For example, the first material (the material of the carrier segment) may be iron or an alloy with iron, e.g. Steel, have or be formed from it.
    For example, the second material (the material of the contact segment) may comprise or be formed from copper.
    An end block assembly may further include an electrical first contact structure for supplying the bearing assembly with electrical energy, e.g. when inserted in the Aufhahmebereich sleeve. The first contact structure may electrically contact the contact segment, e.g. when inserted in the Aufhahmebereich sleeve.
    According to various embodiments, the bearing assembly may include an electrical second contact structure disposed in the sleeve and electrically contacting the shaft. The second contact structure may include one or more abrasive bodies (e.g., carbon brushes) which rub against a surface of the shaft as it is rotated, thus making sliding contact with the shaft.
    According to various embodiments, by means of the second contact structure (for example by means of sliding electrical contacts), the electrical energy necessary for processing can be transmitted via the shaft to a tubular electrode coupled to the shaft.
    According to various embodiments, the first contact structure and the second contact structure may be arranged such that they form an electrically conductive connection, e.g. with in the sleeve inserted storage unit. In this case, the electrical energy can be transmitted from the first contact structure to the contact segment of the sleeve and from the contact segment to the second contact structure, which supplies the electrical energy to the shaft.
    According to various embodiments, an end block assembly may further include a coolant supply for supplying coolant to the bearing assembly.
    According to various embodiments, a processing arrangement may include: a process chamber having a processing area; at least one end block assembly attached to and / or in the process chamber as described above; at least one tubular electrode coupled to the at least one end block assembly for processing a substrate in the processing region.
    According to various embodiments, a bearing assembly for rotatably supporting a tubular electrode may include: a coupling portion for coupling the tubular electrode; a sleeve supporting the coupling portion (for supporting the coupling portion); wherein the sleeve is assembled from a plurality of segments whose outer surfaces form a lateral surface of the bearing assembly and of which at least two segments are formed from different materials; wherein the outer surfaces of the two segments are aligned with each other so that they are aligned.
    According to various embodiments, a method of manufacturing a bearing assembly for rotatably supporting a tubular electrode may include: joining a plurality of segments to a sleeve of the bearing assembly whose outer surfaces form a shell surface of the bearing assembly and at least two segments are formed of different materials; Working the shell surface (e.g., the outside) of the sleeve so that the outer surfaces of the two segments are aligned.
    According to various embodiments, the joining of at least the two segments can be accomplished by a welding process.
    According to various embodiments, the method may further include inserting a bearing unit (ie, a radial or thrust bearing) into the sleeve having a bearing (eg, a rolling or sliding bearing) and a bearing (eg, about an axis of rotation) Rotation axis) rotatably mounted shaft, wherein the rotatably mounted shaft has the coupling portion for coupling the tubular electrode. The shaft may be longitudinally extended in the direction of its axis of rotation (i.e., axially).
    According to various embodiments, an end block assembly for rotatably supporting a tubular electrode in a process chamber may include: a tubular sleeve comprising: a first segment for receiving a bearing unit in the first segment, the second segment having a first material; a second segment for contacting the sleeve, the second segment being connected to the first segment and having a second material.
    The first segment may be configured to receive a storage unit and to have a storage unit receiving area (with, for example, a mating recess and / or a mounting structure for securing the storage unit). The second segment can be used for
    Receiving a contact structure and have a contact structure receiving area (with, for example, a matching recess and / or a fastening structure for attaching the contact structure).
    According to various embodiments, an end block assembly for rotatably supporting a tubular electrode in a process chamber may include: a housing having an opening for receiving a sleeve; the sleeve inserted in the opening; wherein a first segment of the sleeve is formed of a first material for receiving a bearing unit and a second segment of the sleeve is formed of a second material for electrically contacting the sleeve;
    According to various embodiments, the first segment may have an outer diameter which deviates less than 0.1 mm from an outer diameter of the second segment. Thus, an electrical contact can be facilitated.
    According to various embodiments, the two segments (also referred to as sleeve segments) can be combined or processed in such a way that the lateral surface regions of the sleeve formed by the two segments are aligned so that the sleeve fits into the opening.
    That two surfaces (e.g., the outer surfaces) are aligned with each other can be understood in this application to mean that an offset between the two surfaces (measured perpendicular to the surfaces) is less than about 0.1 mm, e.g. less than about 0.05 mm, e.g. less than about 0.01 mm, e.g. less than about 0.005 mm, e.g. less than about 0.002 mm, e.g. less than about 0.001 mm, e.g. less than about 0.5 pm, e.g. less than about 0.2 pm. Illustratively, the two surfaces may be substantially parallel to each other and / or continue (e.g., substantially offset). For example, the center axes of the lateral surfaces of the two segments (e.g., two cylindrical segments) may be clearly superimposed, i. be identical.
    Through the manufacturing process (e.g., by machining), the two segments, or their outer surfaces, may have a roughness defined by the manufacturing process. The offset between the mutually aligned outer surfaces of the two segments may, according to various embodiments, be smaller than the roughness of the two segments, e.g. less than 0.5 pm, e.g. less than 0.2 pm. Illustratively, the outer surfaces of the two segments may form a common surface (e.g., lateral surface).
    Embodiments of the invention are illustrated in the figures and are explained in more detail below.
    Show it
    1A and 1B each show an end block arrangement according to various embodiments in a schematic side view or cross-sectional view;
    Figure 2A and Figure 2B are each a bearing assembly according to various embodiments in a schematic side view or cross-sectional view;
    3A and 3B each show a bearing arrangement according to various embodiments in a method for producing a bearing arrangement in a schematic perspective view;
    4A and 4B each show a bearing arrangement according to various embodiments in a method for producing a bearing arrangement in a schematic
    Perspective view;
    5A and 5B each show a bearing arrangement according to various embodiments in a method for producing a bearing arrangement in a schematic perspective view;
    FIG. 6 shows a bearing arrangement according to various embodiments in a method for producing a bearing arrangement in a schematic perspective view;
    FIG. 7 shows an end block arrangement according to various embodiments in a schematic side view;
    FIG. 8 shows an end block arrangement according to various embodiments in a schematic cross-sectional view;
    9A to 9C each show a bearing arrangement according to various embodiments in a method for producing a bearing arrangement in a schematic side view or cross-sectional view;
    10A to 10C each show a bearing arrangement according to various embodiments in a method for producing a bearing arrangement in a schematic side view or cross-sectional view;
    11A to 1 IC each show a bearing arrangement according to various embodiments in a method for producing a bearing arrangement in a schematic side view or cross-sectional view;
    FIGS. 12A and 12B each show a processing arrangement according to various
    Embodiments in a schematic side view or cross-sectional view;
    FIG. 13 shows an end block arrangement according to various embodiments in a schematic cross-sectional view; and
    FIG. 14 shows a method for producing a bearing arrangement in a schematic sequence diagram.
    In the following detailed description, reference is made to the accompanying drawings which form a part hereof and in which is shown by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terminology such as "top", "bottom", "front", "back", "front", "rear", etc. is used with reference to the orientation of the described figure (s). Because components of embodiments can be positioned in a number of different orientations, the directional terminology is illustrative and not restrictive in any way. It will be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention. It should be understood that the features of the various exemplary embodiments described herein may be combined with each other unless specifically stated otherwise. The following detailed description is therefore not to be taken in a limiting sense, and the scope of the present invention is defined by the appended claims.
    As used herein, the terms "connected," "connected," and "coupled" are used to describe both a direct and indirect connection, a direct or indirect connection, and a direct or indirect one
    Coupling. In the figures, identical or similar elements are provided with identical reference numerals, as appropriate.
    A bearing assembly (may also be referred to as a wear cartridge) may be disposed in a media end block and may include a rotatable shaft and an outer housing (sleeve). Between the sleeve and the shaft wear components such as e.g. Bearing, water and vacuum seal and grinding (for example, electric charcoal) for transmitting the electric current to the shaft, be arranged. The complete bearing assembly can be preassembled in the housing of the Medienendblockes (Endblockgehäuse) used and / or replaced.
    FIG. 1A illustrates an end block assembly 100a according to various embodiments in a schematic side view or cross-sectional view.
    The end block assembly 100a may include a bearing assembly 200a that may include a coupling portion 202b for coupling a tubular electrode (not shown). Further, the end block assembly 100a may include a receiving portion 102 for receiving the bearing assembly 200a.
    The bearing assembly 200a may include a sleeve 204 that supports the coupling portion 202b. The sleeve 204 may be configured to fit within the containment area 102. In other words, the sleeve 204 may be insertable into the receiving area 102, e.g. along direction 101.
    According to various embodiments, the sleeve 204 may be inserted into the receiving region 102, in other words, the sleeve 204 may be received in the receiving region 102 in a form-fitting manner.
    The sleeve 204 may be composed of several segments (see FIG. 2A) whose outer surfaces form a lateral surface 204m of the bearing arrangement 200a.
    Fig. 1B illustrates an end block assembly 100b according to various embodiments in a schematic side view or cross-sectional view.
    The end block assembly 100b may include a housing 110 having an opening 110o. The opening 110 may form or at least limit the Aufhahmebereich 102.
    The sleeve 204 may be insertable into the opening 110o, i. into the opening 110 when the sleeve 204 is formed smaller than the opening 110 o. In other words, an extension 1 lOd of the opening 110o (e.g., its diameter) may be greater than an extent 204d of the sheath 204 (e.g., its diameter).
    Thus, between the sleeve 204 and the surfaces of the housing 110, which delimit the opening 110 o, a gap may extend, which may be defined by the difference between the extension 1 10d of the opening 110 o and the extension 204 d of the sleeve 204. This can be a freedom of movement in the opening 110ο exist for the sleeve 204 in which the sleeve 204 can move freely after insertion (clearance). In other words, the extension 1 lOd of the opening 110o may be larger than the extent 204d of the sleeve 204.
    The difference of the extent 1 lOd of the opening 110o and the extent 204d of the sleeve 204 to each other may be less than 0.1 mm, e.g. less than 0.05 mm, e.g. less than 0.01 mm, e.g. less than 0.005 mm, e.g. less than 0.002 mm.
    2A illustrates a bearing assembly 200a according to various embodiments in a schematic side view or cross-sectional view.
    The bearing assembly 200a may include a coupling portion 202b for coupling a tubular electrode (not shown). Further, the bearing assembly 200a may include a sleeve 204 supporting the coupling portion 202b.
    According to various embodiments, the sleeve 204 may be assembled from a plurality of segments, e.g. a first segment 204t (may also be referred to as a carrier segment) and a second segment 204k (may also be referred to as a contact segment), as shown in Fig. 2A. The two segments 204t, 204k (the first segment 204t and the second segment 204k) may be formed of different materials.
    The outer surfaces (also referred to as circumferential surfaces) of the two segments 204t, 204k may form a lateral surface 204m of the bearing assembly. The outer surfaces of the two segments 204t, 204k may be aligned with each other so that they are aligned with each other. In other words, the two segments 204t, 204k may be aligned and / or formed with each other such that their outer surfaces curse each other, i. essentially no offset to each other.
    For example, the first segment 204t may have an outer diameter 214d that deviates less than 0.1 mm from an outer diameter 224d of the second segment 204k, e.g. less than 0.05 mm, e.g. less than 0.01 mm, e.g. less than 0.005 mm, e.g. less than 0.002 mm.
    The larger outer diameter 214d, 224d of the two segments 204t, 204k may define the outer diameter 204d of the sleeve 204.
    FIG. 2B illustrates a bearing arrangement 200b according to various embodiments in a schematic side view or cross-sectional view.
    The bearing assembly 200b may include a bearing unit 206 inserted into the sleeve 204, which has a bearing 2061 (e.g., a rolling bearing) and a shaft 202 rotatably supported by the bearing 2061. The shaft 202 may have the coupling portion 202b at its end portion.
    Further, the bearing assembly 200b may include an electrical contact structure 208 (also referred to as a second contact structure) disposed within the sleeve 204 (e.g., plugged in) and electrically contacting the shaft 202.
    The contact structure 208 may be electrically conductively connected to the second segment 204k (also referred to as a contact segment). For example, the contact structure 208 may be attached to the second segment 204k.
    The contact structure 208 may form with the shaft 202 a sliding contact 208k (also referred to as a sliding contact) which establishes an electrical connection between the second segment 204k and the rotatably mounted shaft 202, and reliably contacts the shaft 202 during rotation, thus generating an electrical current (eg, DC or AC) may flow between the second segment 204k and the shaft 202.
    For example, an abrasive body of the contact structure 208 can rest on the surface of the shaft 202 so that it slides over the shaft 202 when the shaft 202 is rotated.
    FIGS. 3A and 3B each illustrate a bearing assembly 300a according to various embodiments in a method of manufacturing a bearing assembly 300a in a schematic perspective view.
    The sleeve 204 of the bearing assembly 300a (housing of the bearing assembly) may be a milled part into which a plurality of recesses and a plurality of attachment structures are formed.
    For example, the sleeve 204 may include a support segment 204t having a recess (e.g., annular) 204a for receiving at least one contact segment 204k, e.g. two contact segments 204k, as shown in Fig.3A.
    The use of two contact segments 204k has the advantage that they can be introduced externally into the recess 204a and thus form an annular contact of the bearing arrangement 300a. Thus, the largest possible contact area (through the outer surface of the contact segments 204k) is clearly reached, at which the bearing assembly 300a can be contacted.
    As illustrated in Figure 3A, the contact segments 204k may be bent, e.g. cupped, e.g. in the form of a half shell, third shell, quarter shell, etc.
    Alternatively to the bearing assembly 300a illustrated in FIG. 3A, differently shaped contact segments 204k may also be used and / or more than two contact segments 204k may be used, e.g. three, four or more than four contact segments 204k.
    The contact segments 204k illustrated in FIG. 3A may be fastened to the support segment 204t by means of screws 302 or may be e.g. to a mounting structure (e.g., holes and / or threads) of the support segment 204t.
    According to various embodiments, the support segment 204t may include or be formed from a sturdy material (first material) for stiffening the bearing assembly 300a.
    The first material may for example comprise or be formed from a metal, e.g. a metallic element such as iron (Fe), aluminum (Al), titanium (Ti), magnesium (Mg), platinum (Pt) or chromium (Cr). Alternatively or additionally, the metal may be a metal compound (e.g., an intermetallic compound or an alloy such as an aluminum alloy or
    Iron alloy) or formed therefrom, e.g. a compound of at least two metallic elements, e.g. Aluminum bronze or brass, or e.g. a compound of at least one metallic element and at least one non-metallic element, e.g. Steel, e.g. stainless steel.
    According to various embodiments, at least one of the contact segments 204k (e.g., two or more than two contact segments 204k) may be formed from a second material. The second material may for example comprise or be formed from a metal, e.g. a metallic element such as copper (Cu), aluminum (Al), gold (Au), silver (Ag), magnesium (Mg) or platinum (Pt). Alternatively or additionally, the metal may comprise or be formed from a metal compound (e.g., an intermetallic compound or an alloy such as a copper alloy), e.g. a compound of at least two metallic elements, e.g. Copper with silver, or e.g. a compound of at least one metallic element and at least one non-metallic element.
    The second material may e.g. High purity copper (so-called pure copper) or formed therefrom, e.g. Pure copper with high electrical conductivity (so-called electro-copper), e.g. Cu-ETP (electrolytically refined copper, also known as E-Cu58, E-Cu57 or E-Cu), Cu-FRHC (fire-refined tough-pitch high-conductivity copper), Cu-OF (oxygen-free copper), Cu-PHC (deoxidized high-conductivity low-phosphorus copper, phosphorus deoxidized high-conductivity copper), Cu-HCP (deoxidized high-conductivity phosphorus deoxidized copper), Cu -DLP (low residual phosphorus deoxidized copper, phosphorus deoxidized copper with low residual phosporus), Cu-DHP (deoxidized copper with limited high residual phosphorus content, phosphorus-deoxidized copper with high residual phosporus).
    The second material, e.g. Pure copper, may have impurities (e.g., non-metallic impurities, e.g., oxygen) to a very small extent, e.g. of less than 0.10 at% (atomic percent), e.g. of less than 0.06 at%, e.g. of less than 0.04 at%, e.g. of less than 0.02 at%, e.g. less than 0.01 at%. As a result, a particularly high electrical conductivity can be achieved.
    According to various embodiments, the second material, e.g. Copper, e.g. Electro copper, a small amount of silver may be added, e.g. less than 0.12 at%, e.g. less than 0.05 at%, e.g. in a range of about 0.03 at% to about 0.12 at%. Alternatively or additionally, the second material, e.g. Copper, e.g. Electro copper, coated by silver (and / or gold), e.g. on its outer surface.
    Electro copper may have an electrical conductivity in a range from about 40 · ΙΟ6 Ω 1 -nL1 to about 60 · ΙΟ6 Ω 1 m_1, e.g. in a range from about 55 · ΙΟ6 Ω_1 · ιη1 to about 60 · ΙΟ6 Ω ^ '- ηΓ1.
    For example, the contact segments 204k may be formed as copper shells, which are inserted into the recesses 204a in the support segment 204t and screwed to the support segment 204t for mounting the bearing assembly 300a, as illustrated in FIG.
    According to various embodiments, the sleeve 204 of the bearing arrangement 300a may be or be manufactured by means of a turning process and / or by means of a milling process. For example, the carrier segment 204t may be made of a round bar (semi-finished product) or be made, e.g. if there is no corresponding tube as a semi-finished product. In the round rod, a passage opening (along the axis) may be or may be formed in a further method step, so that it becomes tubular.
    By fixing a contact segment 204k in the recess 204a, the tolerance range with which the contact segment 204k is manufactured (manufacturing tolerance) and the tolerance range with which the recess 204a is made can add up (see FIG. 1A). Further, precise positioning and attachment of the contact segment 204k in the recess 204a may be limited by the tolerance range at which the holes 302b and threads (for the screws 302) are made. These tolerances may overlap and add (to a deviation) such that the resulting tolerance with which the outer surface 224m of the contact segment 204k and the outer surface 214m of the support segment 204t may be aligned with each other may be greater than the individual tolerance ranges of fabrication (manufacturing tolerances).
    As a result, an offset between the outer surface 224m of the contact segment 204k and the outer surface 214m of the carrier segment 204t may arise (compare FIG. 1A). As a result of the offset, the outer diameter 204d of the bearing arrangement 300a can be greater than the outer diameter 214d of the support segment 204t or the outer diameter 224d of the contact segment 204k itself (see FIG. 1B and FIG. 2A). As a result, introducing the bearing arrangement 300a into the receiving area 102 can be or become difficult.
    For example, insertion of the bearing assembly 300a into the housing 110 of the end block (media end block) may result in jamming on the outer diameter 204d of the bearing assembly 300a. This is because the tolerated outer diameter 204d on the housing of the bearing assembly 300a at the bolted contact segments 204k (e.g., copper shells) can not be ensured (additional inaccuracies due to the gland).
    Furthermore, the electrical contacting of the copper shells can be impaired via the Winkelflachkontakt 802w, or even fünktionieren. The reason for this is also the unsure outer diameter 204d at the contact segments 204k. At the contact point 208k (see FIG. 2B), the current transition may be impaired. For example, the contact resistance between the contact structure 208 and the contact segments 204k may be increased, and thus increased resistive losses may occur which heat the bearing assembly 300a.
    According to various embodiments, the outer surfaces 214m, 224m of the contact segment 204k and the support segment 204t may be aligned with each other. For example, the manufacturing cost may be increased or increased by e.g. the manufacturing tolerances are reduced.
    Alternatively or additionally, an analysis of the fabricated segments 204k, 204t of the bearing assembly 300a may be made and the segments 204k, 204t may be classified based on the analysis or components that do not meet the requirements may be discarded. The joining may then be done taking into account the classification (or analysis) so that mating segments 204k, 204t are joined together (e.g., bolted together). Clearly, contact segments 204k that are too large can be inserted and screwed into recesses 204a that are too large. Thus, the tolerance ranges 1102t, 1102k with which the segments 204k, 204t are made may overlap each other (compare, for example, FIG.
    Alternatively or additionally, the segments 204k, 204t may be joined together using a jig, so that a deviation caused by the manufacturing is compensated by a tolerance which allows the bores and threads. For example, the threads and bores may extend transversely to the outer surfaces 214m, 224m, and / or the recess 204a may have an inclined bottom surface, such that lateral displacement of the contact segments 204k in the recess 204a may be a variation of
    Installation height causes. Thus, the tolerance ranges 1102t, 1102k with which the segments 204k, 204t are made may overlap each other (compare, for example, FIG. 1 IC).
    The support segment 204t may include a mounting structure 304b, e.g. in the form of a radially protruding portion which may have one or more through holes (e.g., bores), grooves or springs for attaching the sleeve 204 to a corresponding mounting structure of the end block housing (not shown), e.g. surrounds the opening 110o.
    The sleeve 204 may, for example, have an inner diameter at the position of the recess 204a in a range of about 50 mm to about 150 mm, e.g. about 100 mm. Further, the support segment 204t may, for example, have an outer diameter 204d in a range from about 50 mm to about 150 mm, e.g. about 130 mm. The wall thickness of the sleeve 204 may be, for example, in a range of about 2 mm to about 30 mm, e.g. in a range of about 2 mm to about 10 mm, or alternatively, e.g. in a range of about 10 mm to about 30 mm, e.g. about 15 mm.
    4A illustrates a bearing assembly 400a according to various embodiments in a method of manufacturing a bearing assembly in a schematic perspective view.
    As an alternative to the bearing arrangement 300a illustrated in FIG. 3A, as illustrated in FIG. 4A, the bearing arrangement 400a can have more than two segments, which, when joined, form the sleeve 204.
    For example, a first segment 204t (support segment 204t), a second segment 204k (contact segment 204k), a third segment 204v (also referred to as a connection segment), and a fourth segment 204r (also referred to as a radial segment) may or may not be assembled to the sleeve.
    Carrier segment 204t and contact segment 204k may be configured as described above.
    The connection segment 204v may connect the radial segment 204r to the contact segment 204k. The connection segment 204v may illustratively serve to make the contact segment 204k as short as possible so that e.g. As little as possible costly pure copper is needed.
    The connecting segment 204v may comprise the first material analogously to the carrier segment 204t, or alternatively another material (third material) different from the first material. The third material may for example comprise or be formed from a metal, e.g. a metallic element such as iron (Fe), aluminum (Al), titanium (Ti), magnesium (Mg) or platinum (Pt). Alternatively or additionally, the metal may comprise a metal compound (e.g., an intermetallic compound or an alloy such as an aluminum alloy or iron alloy), e.g. a compound of at least two metallic elements, e.g. Aluminum bronze or brass, or e.g. a compound of at least one metallic element and at least one non-metallic element, e.g. Stole.
    For example, the first material may include or be formed from steel, and the third material may include or be formed from aluminum.
    The radial segment 204r may comprise, analogously to the support segment 204t, the first material and / or the second material, or alternatively another material (fourth material) which is different from the first material and / or different from the third material. The fourth material may for example comprise or be formed from a metal, e.g. a metallic element such as iron (Fe), aluminum (Al), titanium (Ti), magnesium (Mg) or platinum (Pt). Alternatively or additionally, the metal may comprise a metal compound (e.g., an intermetallic compound or an alloy such as an aluminum alloy or iron alloy), e.g. a compound of at least two metallic elements, e.g. Aluminum bronze or brass, or e.g. a compound of at least one metallic element and at least one non-metallic element, e.g. Stole.
    For example, the first material may include or be formed from steel, and the fourth material may include or be formed from aluminum.
    The segments 204t, 204k, 204v, 204r of the bearing assembly 400a may or may not be joined by means of a joining process (also referred to as a joining or joining process), e.g. by means of an adhesive process or by means of a welding process, e.g. a friction welding process (see Figures 9A to 9C) or an electrically based welding process, e.g. an electron beam welding process or a MBP welding process (pressure-welding with a magnetically-moved arc). The joining process used may or may be adapted to the materials of the segments 204t, 204k, 204v, 204r.
    4B illustrates a bearing arrangement 400b according to various embodiments in a method for producing a bearing arrangement 400b in a schematic perspective view.
    As an alternative to the bearing assemblies illustrated above, as illustrated in FIG. 4A, the bearing assemblies 400b may include three segments 204t, 204k, 204r, which together provide the sleeve 204.
    In the example illustrated in FIG. 4B, the radial segment 204r may be directly connected to the contact segment 204k.
    The assembled segments 204t, 204k, 204r may be e.g. Semi-finished, which will be further processed after joining, as will be explained below.
    According to various embodiments, at least one (i.e., one, two, or all) of the segments 204t, 204k, 204r may be formed of tubular semi-finished products. In order for the tubular semi-finished products to withstand the mechanical stresses when joining, e.g. when pressure is exerted on the tubular semi-finished products, they may or may be reinforced with wall panels 404w. Alternatively or additionally, at least one (i.e., one, two, or all) of the segments 204t, 204k, 204r may be formed from semi-finished products in the form of round bars (i.e., solid material).
    5A illustrates a bearing assembly 500a according to various embodiments in a method of manufacturing a bearing assembly 500a in a schematic perspective view.
    The bearing arrangement 500a illustrated in FIG. 5A shows the sleeve 204 in a method step after joining the segments of the sleeve 204.
    For example, the bearing assembly 500a illustrated in FIG. 5A may be or may be fabricated from the bearing assemblies 400a, 400b illustrated in FIG. 4A or 4B, e.g. after their segments have been joined together.
    Each of the segments that have been assembled to the sleeve 204 may form a portion of the sleeve 204. For example, the contact segment 204k may form a contact portion of the assembled sleeve 204. For example, the radial segment 204r may form a radially protruding portion 304r of the sleeve 204, etc.
    As described above, a connection portion may be connected as a separate segment (connection segment 204v) to the other segments, or be connected to the other segments as part of the radial segment 204r. Radial segment 204r may be e.g. be processed before or after joining, e.g. to form a radially protruding portion 304r of the sleeve 204.
    According to various embodiments, the outer surfaces 214m, 224m, 234m of the segments 204t, 204k, 204v (ie, the outer surface thereof) may be machined such that the outer surfaces 214m, 224m, 234m of the segments 204t, 204k, 204v are aligned (see FIG for example Fig.9C or Fig.10A). The outer surfaces 214m, 224m, 234m may form the outer surface 204m of the sleeve 204, and e.g. adjoin each other flush.
    Optionally, the inner surfaces of the segments 204t, 204k, 204r, 204v (i.e., their inner side) may have been processed (compare, for example, Fig. 10B).
    FIG. 5B illustrates a bearing arrangement 500b according to various embodiments in a method for producing a bearing arrangement in a schematic perspective view.
    The bearing arrangement 500b illustrated in FIG. 5B shows the sleeve 204 in a method step after joining the segments of the sleeve 204 and / or after forming the radially protruding section 304r of the sleeve 204 and / or after machining the outside of the segments 204t, 204k , 204v, and the sleeve 204, respectively.
    The bearing arrangement 500b illustrated in FIG. 5B can be produced, for example, from the bearing arrangements 400a, 400b, 500a illustrated in FIG. 4A, 4B or 5A.
    In the connection segment 204r (connection portion), optional (side) through holes 502o may be formed. Further, in the connecting segment 204v, a mounting structure 504b (e.g., one of a plurality of drilled holes and / or threads) may or may not be formed.
    Optionally, a mounting structure 506b (e.g., one of a plurality of drilled holes and / or threads) may be formed in the contact segment 204k (contact portion).
    Optionally, a mounting structure 304b (e.g., one of a plurality of drilled holes and / or threads) may be formed in the radially protruding portion 304r of the sleeve 204.
    6 illustrates a bearing arrangement 600 according to various embodiments in a method for producing a bearing arrangement in a schematic perspective view.
    The bearing arrangement 600 illustrated in FIG. 6 shows the bearing arrangement 600 in a method step according to one of the method steps described above.
    The attachment structures in the connection segment 204v and the contact segment 204k may serve to secure a contact structure 208 (second contact structure) to the sleeve 204. For example, electrical leads 2081 (e.g., copper cables) may be connected to the contact segment 204k and electrically contacted. Further, a support 208h may be disposed inside the sleeve 204 and secured to the connection segment 204v. The bracket 208h may serve to receive and hold abrasive articles.
    Further, a shaft 202 (front part shown transparent) may be received in the sleeve 204 as described above.
    7 illustrates an end block assembly 700 according to various embodiments in a schematic side view.
    The end block assembly 700 may include an end block housing 110 that provides a containment area by means of an opening 110 o. Further, the end block assembly 700 may include a bearing assembly 200a or another of the previously described bearing arrangements, e.g. the bearing assemblies 600.
    The bearing assembly 200a can be inserted along a direction 101 in the opening 110o, so that it is positively received in the opening 110ο.
    The attachment structure in the radial portion 304r may be e.g. a plurality of screws which can be screwed into matching threaded openings in the Endblockgehäuse 110 when the bearing assembly 200a is inserted into the opening 110ο.
    The outer surface 204m of the bearing assembly 200a may be free of misalignment (e.g., a protrusion or irregularity) and may have a uniform outer diameter 204d along the portion 702e (male portion) of the bearing assembly 200a which is inserted into the aperture 110o.
    Alternatively, at least the connecting segment 204v may have an outer diameter which is larger than the outer diameter 204d. In this way, protection of the static sealing surfaces in the end block housing 110 can be achieved.
    8 illustrates an end block assembly 800 according to various embodiments in a schematic cross-sectional view, e.g. by the end block assembly 700 with inserted bearing assembly 200a (or other of the previously described bearing assemblies, e.g., with bearing assemblies 600 inserted).
    The bearing assembly 200a may include the shaft 202 as described above. The shaft 202 may be or may be plugged into the sleeve 204. Further, the bearing assembly 200a may include a coupling flange coupled to the shaft 202 (optionally comprising one or more connecting elements, such as two or more than two half shells) 611 for coupling a tubular electrode (also referred to as tube cathode).
    According to various embodiments, the end block assembly 800 may include an electrical first contact structure 802 that may include an angular flat contact 802w and a plug contact 802s. The Winkelflachkontakt 802w can supply the plug-in contact 802s electrical energy. The plug contact 802s may be configured to make electrical contact with the contact segment 204k, or with its outer surface 224m (transparent in the illustration), e.g. with bearing assembly 200a inserted into end block housing 110.
    In this way, a reliable (reliable) current transition from the angular contact 802w to the bearing arrangement 200a can be achieved.
    The contact segment 204k is used according to various embodiments for better current contacting of the bearing assembly 200a via the Winkelflachkontakt 802w.
    According to various embodiments, the bearing assembly 200a may further include an electrical second contact structure 208. The second contact structure 208 may include electrical leads 2081, e.g. in the form of power ropes, and abrasive 208s, e.g. in the form of electric charcoal (may also be referred to as carbon brushes). The electrical leads 2081 may or may not be screwed into the contact segment 204k and conduct the electrical current to the abrasive bodies 208s. The abrasive bodies 208s may make electrical contact with a surface 206m of the shaft 202, e.g. when inserted into the sleeve 204 shaft 202.
    The abrasive body or wheels 208s may be supported by means of a support (also referred to as abrasive carbon cage), wherein the support and abrasive articles form a so-called abrasive brush ring which annularly surrounds the shaft 202 to be electrically contacted.
    As illustrated in FIG. 8, the end block assembly 800 may further include a coolant supply 804 (eg, tubes and / or recesses in the housing may be part of the coolant supply 804) for introducing coolant (eg, cooling water) into the housing 110 and / or for discharging coolant out of the housing 110. Further, a corresponding coolant coupling (e.g., in the form of a flange) may be provided in the housing 110 or may be coupled to the shaft for coupling the coolant supply 804. For example, the end block assembly 300 may include a flange that may, for example, be configured to direct the coolant into or out of the shaft 202.
    9A, 9B and 9C each illustrate a bearing assembly according to various embodiments in a method of manufacturing a bearing assembly in a schematic side view or cross-sectional view, e.g. the bearing assembly 200a or another of the previously described bearing assemblies, e.g. the bearing assemblies 600.
    9A exemplifies an assembly 900a according to various embodiments by including multiple segments, e.g. the first segment 204t and the second segment 204k are interconnected.
    The joining 900a can be done, for example, by means of a welding process, e.g. by means of a friction welding process, as will be explained below.
    In a friction welding process, the two segments 204k, 204t are moved toward each other (first movement), e.g. along direction 901 until they touch and form a contact surface (i.e., the two segments 204k, 204t are brought into contact with each other). During the agitation, the two segments 204k, 204t are moved transversely to this movement (second movement), e.g. transverse to direction 901, e.g. rotated in the direction of 901.
    As the two segments 204k, 204t touch, they are pressed against each other while maintaining the second movement (e.g., under rotation) so that they rub against each other at the contact surface (mating surface). The friction of the two segments 204k, 204t against each other at the contact surface generates heat which heats and softens the material at the contact surface. The heated areas (contact areas) of the two segments 204k, 204t are interconnected by this process and form a joint area 204f (see FIG. 9B).
    If the two segments 204k, 204t pressed against each other under rotation one speaks of the so-called rotary friction welding.
    In other words, the power supply for joining (joining) the two segments 204k, 204t is introduced by the relative movement of the two segments 204k, 204t to each other under pressure.
    As an alternative to friction welding, other joining processes may be used, e.g. another welding process, e.g. Electron beam welding, an adhesive process, a screw (see Figure 3A and Figure 3B), a pinning and / or a soldering process. In other words, a material bond and a positive connection of the two segments 204k, 204t are possible together in combination.
    An adhesive process or a soldering process can lead to a joining region 204f, which may have a lower mechanical or thermal load capacity, than a joining region formed by means of a welding process or screwing. Lower mechanical or thermal loading may result in earlier failure of the connection of the two segments 204k, 204t, e.g. at high temperatures and / or heavy electrodes.
    A variety of materials, such as aluminum with steel or copper with steel or copper with aluminum, may be joined, e.g. be welded together. The joining (joining) of metallic materials that do not alloy with each other is possible in this way.
    For example, two tubes (one tube for each segment), e.g. a pipe made of (for example, stainless) steel, which forms the support segment 204t, and a copper pipe (or a copper rod), which forms the contact segment 204k, connected together. The tubes may or may not be provided as a (tubular) semi-finished product.
    Similarly, more than two segments can be interconnected, e.g. successively (see Fig.4A or Fig.4B). For example, they may be joined together in the order steel-copper-steel by friction welding, whereby one steel segment (corresponding to the support segment 204t), one copper segment (corresponding to the contact segment 204k) and another steel segment (corresponding to the radial segment 204r or the connection segment 204v) are interconnected get connected.
    For example, the copper segment may be or may be formed from electro-copper because of the high purity and excellent electrical conductivity of electro-copper. For example, electric copper of the make Cu-ETP (CW 004A) 2.0060 can be used.
    When the steel segment in the form of the connecting segment 204v is connected to the copper segment (see FIG. 4A), then the radial segment 204r can be welded in the form of a flange which serves to fasten the bearing arrangement to the end block housing 110, e.g. by means of a friction welding process or by means of another welding process.
    Alternatively, the flange may already be integrated in one of the two friction-welded steel tubes (corresponding to the radial segment 204r), e.g. If necessary, the flange can be machined out after the segments have been assembled.
    After assembly 900a (e.g., after the weld has been made), sleeve 204 may include a joining region 204f which may be e.g. by friction welding (e.g., rotary friction welding) the two segments 204t, 204k, as shown in Fig. 9B. The joining region 204f may be e.g. thickened, as exemplified in Fig. 9B, e.g. through a welding process.
    Further, the method may include machining 900c of the outside of the sleeve 204, as illustrated in FIG. 9C. In this case, an outer shell 904 can be removed from the sleeve 204, so that the outer surfaces of the two segments 204k, 204t are aligned with one another and form the lateral surface 204m of the sleeve 204.
    For example, to process the sleeve 204, a machining process, e.g. a turning process (turning) can be used. For this, e.g. a cutting tool 902 (e.g., a turning tool) may be used which is or will be secured in a defined position relative to the sleeve 204 while the sleeve 204 is guided past the cutting tool 902 in rotation. Thereby, e.g. a chip 904 are lifted off the sleeve 204 (also referred to as machining or machining).
    Alternatively or additionally, another machining process, e.g. a shaping machining process used to machine the sleeve 204, e.g. a grinding process (grinding), a milling process (milling), a sawing process (sawing) and / or a drilling process (drilling).
    Alternatively, when machining the sleeve 204, at least the thickened joining portion 204f may be removed (e.g., by over-tightening).
    FIGS. 10A, 10B and 10C each illustrate a bearing assembly according to various embodiments in a method of manufacturing a bearing assembly in a schematic side view or cross-sectional view, e.g. the bearing assembly 200a or another of the previously described bearing assemblies, e.g. the bearing assemblies 600.
    10A illustrates an edit 1000a of an exterior of the sleeve 204.
    By machining the sleeve 204, the bearing assembly can be brought to the outside diameter 204d, e.g. over the entire length L of the sleeve 204, as illustrated in FIG. 10A.
    By a proper outside diameter 204d, the wear cartridge can be easily (i.e., with little effort) inserted into the end block housing 110 (e.g. pushed in (disassembled), e.g. be pulled out.
    As a result, the current contact via the Winkelflachkontakt 802w on the bearing assembly, or the contact segment 204k, and thus on electrode (also referred to as target) can be improved. This contributes to the process reliability and process precession of a coating system (targeted power transfer).
    According to various embodiments, simple, inexpensive semi-finished products may be used (e.g., tubes) to form the segments. This reduces manufacturing costs.
    This makes it possible to form a sleeve 204 whose outer surface forms an offset-free lateral surface 204m of the bearing arrangement and which has at least two segments of different materials.
    Further, the method may optionally include machining 1000b of the inner surface of the sleeve 204, which is illustrated in FIG. 10B. By machining the inner surface of the sleeve 204, an opening 204o (e.g., an axial through hole) may be formed in the sleeve 204 for receiving the bearing unit and the second contact structure as described above. Be rod-shaped carrier, i. Rods used to form the segments, it may be necessary to drill the hole 204o or to make milling.
    Alternatively or additionally, a shell, or chip, may be removed from the inside of the sleeve 204, analogous to the outside of the sleeve 204 (e.g., when tubular supports, i.e., tubes, are used to form the segments), e.g. Cutting, e.g. by means of a cutting tool 1002 as illustrated in Fig. 10B.
    The wall thickness 1204d of the machined sleeve 204 may be, for example, in a range of about 2 mm to about 30 mm, e.g. in a range of about 2 mm to about 10 mm, or alternatively, e.g. in a range of about 10 mm to about 30 mm, e.g. about 15 mm. The sleeve 204 may, for example, have an inner diameter 1204i of about 50 mm to about 150 mm, e.g. about 100 mm.
    The method may optionally include one or more lateral passages 502o to form 1000c, as illustrated in FIG. by means of a milling process and / or a drilling process.
    FIGS. 11A, 11B and 11C each illustrate a bearing assembly according to various embodiments in a method of manufacturing a bearing assembly in a schematic side view or cross-sectional view.
    11A exemplifies an assembly 1100a according to various embodiments in which the second segment 204k is or will be disposed in a recess 204a in the first segment 204t.
    The manufacture of workpieces, e.g. the segments of the sleeve 204, is subject to certain manufacturing tolerances. Illustratively, the sleeve 204 may be e.g. advised too big for the opening, since the manufacturing process is subject to manufacturing tolerances and the outer surface of the sleeve 204 can not be made arbitrarily precise. As a result, an outer surface of the sleeve 204, e.g. an outer surface 214m of the first segment 204t, a tolerance range 1102t (also referred to as a tolerance field) in which the actual dimensions of the sleeve 204 are located.
    Similarly, the opening 110o in the housing 110 may have a tolerance range 1110 and an outer surface 214m of the second segment 204k may have a tolerance range 1102k. Likewise, the recess 204a in which the second segment 204k is or may be arranged has the tolerance range 1202t.
    If the second segment 204k is arranged in the recess 204a, the tolerance range 1102t of the recess 204a and the tolerance range 1102k of the second segment 204k may add up. As a result, an offset 11 lOv of the outer surface 214m of the first segment 204t to the outer surface 224m of the second segment 204k may arise.
    The tolerance range 1102k of the second segment 204k may then overlap with the tolerance range 1110 of the opening 110o such that an oversize (i.e., interference fit) arises. In this case, the second segment 204k can wedge with the housing 110 when the sleeve 204 is brought into the opening 1 lo. The overlapping may be understood in accordance with a projection along the direction of insertion, along which the sleeve 204 is brought into the opening 110 or inserted or inserted.
    11B exemplarily illustrates machining 1100b of sleeve 204 by removing (i.e., removing) a portion of second segment 204k. Thereby, the outer surfaces of the first segment 204t and the second segment 204k may or may be aligned with each other.
    According to various embodiments, an offset 11 lOv of the outer surfaces 224m may be removed from each other as illustrated in FIG. 1B, e.g. analogous to the method step illustrated in FIG. 9C. As a result, the outer surfaces 214m, 224m may or may be aligned with each other 1100c, as illustrated in FIG. 1C.
    Alternatively, the first segment 204t and the second segment 204k may be appropriately selected as described above, e.g. by an analysis of the two segments 204t, 204k. As a result, the outer surfaces 214m, 224m may or may be aligned with each other 1100c, as illustrated in FIG. 1C.
    Thus, the tolerance range 1102t of the first segment 204t and the tolerance range 1102k of the second segment 204k may overlap one another, e.g. partially or completely, as shown in Fig.l IC. Thus, a better fit can be achieved clearly, without the risk that the sleeve 204 jammed in the opening 110ο.
    In other words, an outer diameter of the sleeve 204 on the first segment 204t and an outer diameter of the sleeve 204 on the second segment 204k may be formed such that their tolerance ranges overlap. For example, the first segment 204t and / or the second segment 204k may be tubular (see Fig. 4A) or cupped (compare Fig. 3A) (i.e., be in the form of half-shells, for example).
    FIG. 12A illustrates a processing assembly 1200a (may also be referred to as a vacuum assembly) according to various embodiments in a side view or cross-sectional view, wherein the processing assembly 1200a may include a vacuum chamber 1202 (may also be referred to as a vacuum process chamber) having a process area 1000s for processing (eg, coating). of a substrate 1020 within the processing area 1000s. Therein, the processing assembly 1200a may include at least one end block assembly 100a (or also the end block assembly 700 or 800) for holding at least one tubular electrode 1030 (e.g., a tube cathode) within the vacuum processing chamber 1202.
    The processing assembly 1200a may be part of a coating system for performing a coating process, e.g. a sputtering process.
    The end block assembly 100a may include at least one end block housing 110 in which a shaft (hidden in the view) is rotatably supported (e.g., about an axis 1000). Further, the tubular electrode 1030 may be coupled to the at least one end block assembly 100a, e.g. to the shaft of the end block assembly 100a.
    Furthermore, the at least one end block arrangement 100a may be arranged on and / or in the vacuum chamber 1202. Alternatively, at least the end block assembly 100a may also be attached to or partially within a chamber lid 306 which vacuum-tightly covers a chamber opening.
    According to various embodiments, the end block assembly 100a may be configured as a media end block assembly 100a configured to power the tubular cathode 1030 with electrical power and / or with coolant. Further, the tubular cathode 1030 may be held, rotatably supported, and driven at the opposite axial end portion by a drive end block 310. Alternatively, a drive for rotating the tubular electrode 1030 may be integrated into the media end block assembly 100a described herein.
    It is understood that the vacuum chamber 1202 may be any process chamber that can ensure operation of the tubular electrode 1030. For example, by means of the end block assembly 100a described herein, a magnetron may be provided with a tubular cathode 1030 (or with two tubular cathodes 1030), wherein the tubular cathode 1030 may be held and operated by a media end block assembly 100a and by a drive end block 310 in a vacuum processing chamber 1202.
    For this purpose, a vacuum pump arrangement (not shown) can be coupled to the vacuum process chamber 1202, wherein the vacuum pump arrangement has, for example, at least one backing pump and at least one high vacuum pump. Further, the processing assembly 1200a may include a transport system for transporting the substrate 1020 (or multiple substrates 1020) through the vacuum processing chamber 1202. In this case, the transport system may have one or more rollers or rollers. The transport system, e.g. comprising a plurality of rollers or rollers, may be arranged such that the substrate 1020 is transported along a transport direction which is directed substantially perpendicular to the axis of rotation lOOOr of the at least one tube cathode 1030, or the shaft. Thus, the substrate 1020 can be clearly processed across the entire width of the substrate, e.g. be coated.
    As illustrated in FIG. 12B, the end block housing 110 of the end block assembly 100a may be secured to the vacuum processing chamber 1202 (or chamber lid 306) by means of a pivot coupling 1040. For example, the articulated coupling 1040 may allow deflection of the end block housing 110 from a rest position by a few degrees, e.g. a deflection of less than 5 °. Further, the articulated coupling 1040 may be configured to compensate for forces transmitted by the tubular electrode 1030 to the end block assembly 100a, e.g., by means of a resilient member. due to non-circularity or due to manufacturing tolerances of the tubular electrode 1030.
    According to various embodiments, the articulated coupling 1040 may be configured as a ball joint (having one, two or three rotational degrees of freedom, i.e. rotational degrees of freedom) and / or translational joint (having one, two or three translational degrees of freedom, i.e. translational degrees of freedom). For example, the articulated coupling 1040 may allow the end block assembly 100a to rotate or pivot about an axis 1000k perpendicular to the axis of rotation lOOOr of the tubular electrode 1030. The axle 1000k may extend perpendicular to the wall member to which the end block housing is mounted. Furthermore, the axis 1000k can also be directed perpendicular to the transport direction.
    The articulated coupling 1040 can function as a cushioning. Further, by means of the articulated coupling 1040, the life of the end block assembly 100a can be extended since the end block assembly 100a has a rigid rolling bearing 2061 to which forces transmitted from the tubular electrode 1030 to the end block assembly 100a act directly can. In contrast, the drive end block 310 may be fixedly mounted to the process chamber.
    By means of the articulated coupling 1040, forces acting on the end block assembly 100a can be compensated (defined initiated), i. Forces or torques are absorbed resiliently, which, for. caused by the weight of the tubular electrode 1030, e.g. For example, a tubular electrode 1030 which deviates from a rotationally symmetrical shape and / or whose axis of rotation deviates from its principal axis of inertia, e.g. caused by an imbalance or a tolerant production of the electrode 1030, cause vibrations during rotation, which are e.g. be transferred to the shaft. The articulated coupling 1040 clearly makes it possible to use a long tubular electrode 1030 and to reduce a bearing clearance.
    In other words, the articulated coupling 1040 may be arranged to compensate for (initiate), by means of a resilient element, forces (torques), i. Can elastically lift forces or torques transmitted from the tubular electrode 1030 to the end block assembly 100a, e.g. due to non-circularity or due to manufacturing tolerances of the tubular electrode 1030.
    For example, the tubular electrode 1030 may have a length substantially equal to the distance of the end block assembly 100a to the end block 310) that is greater than about 1 meter, which is greater than about 2 meters, e.g. greater than about 2.5 m, e.g. greater than about 3 m, e.g. greater than about 3.5 m, e.g. about 4 m, e.g. in a range of about 2.5 m to about 5 m.
    13 illustrates an end block assembly 1300 according to various embodiments of a schematic cross-sectional view.
    The end block assembly 1300 may include the shaft 202, the bearing 2061, and the second contact structure 208, the shaft 202 being rotatably supported by the bearing 2061 (e.g., roller bearing) and electrically contacted by the second contact structure 208.
    The end block assembly 1300 may further include the sleeve 204, which is composed of the first segment 204t, the second segment 204k, and at least one further segment 204v, 204r. The further segment 204v, 204r may e.g. be provided in one piece (as a radial segment 204r) or in two pieces (as a radial segment 204r and connecting segment 204v).
    The bearing 2061 may be received in the first segment 204t and / or supported by the first segment 204t. For example, the bearing 2061 may be or may be plugged into the first segment 204t, e.g. fit.
    The second contact structure 208 may include the abrasive bodies 208s and the current ropes 2081 with the abrasive bodies 208s resting on the shaft 202 to form a sliding contact and the current ropes 2081 electrically contacting the abrasive bodies 208s and electrically connecting to the second segment 204k.
    Further, the end block assembly 1300 may include the housing 110 (end block housing) in which the sleeve 204 is received.
    In addition, the end block assembly 1300 may include a plurality of sealing structures 204ds disposed between the sleeve 204 and the shaft 202 for sealing a gap between the sleeve 204 and the shaft 202. Thus, the gap between the sleeve 204 and the shaft 202 in which the Bearing 2061 and the second contact structure 208 are arranged to be sealed from the outside of the sleeve 204, for example vacuum-tight and / or waterproof.
    In the sleeve 204, one or more recesses 244a, e.g. in the form of grooves, for receiving the sealing structures 204ds.
    In the sleeve 204, one or more through-holes 1302 (e.g., bores) may be formed, e.g. in the region in which the sealing structures 204ds are or are arranged, for an intermediate suction on the sealing structures 204ds. In other words, a space within the sealing structures 204ds can be pumped out or sucked through through openings 1302.
    FIG. 14 illustrates a method 1400 for producing a bearing arrangement in a schematic sequence diagram.
    According to various embodiments, the method 1400 has a plurality of segments joined together to form a sleeve of the bearing arrangement in 1402, wherein the outer surfaces of the plurality of segments form a lateral surface of the bearing arrangement and wherein at least two segments of the plurality of segments are formed from different materials.
    Further, at 1402, the method 1400 has to process the shell surface (e.g., the outside) of the sleeve so that the outer surfaces of the two segments are aligned.
    Optionally, the method 1400 is to machine the inside of the sleeve so that the insides of the two segments are aligned.
    Alternatively or additionally, the method 1400 includes machining the inside of the sleeve so that a bearing unit receiving area (eg with a matching recess, eg in the form of a groove, and / or a mounting structure for securing the bearing unit) in a segment (eg the carrier segment) of the plurality of segments is formed and / or a contact structure Aufiiahmebereich (with eg a matching recess, eg in the form of a groove, and / or a mounting structure for attaching the contact structure) in another segment (eg the contact segment) of the plurality of segments is formed.
    权利要求:
    Claims (14)
    [1]
    claims
    An end block assembly (100a, 700, 800) for rotatably supporting a tubular electrode in a process chamber, the end block assembly (100a, 700, 800) comprising: a receiving portion (102) for receiving a bearing assembly (200a, 600) which includes a Coupling region for coupling the tubular electrode has; The bearing assembly (200a, 600), the coupling portion of which is supported by a sleeve (204) of the bearing assembly (200a, 600), the sleeve (204) being inserted into the receiving portion (102); Wherein the sleeve (204) is assembled from a plurality of segments whose outer surfaces form a lateral surface (204m) of the bearing assembly (200a, 600) and of which at least two segments (204t, 204k) are formed of different materials; • wherein the outer surfaces (214m, 224m) of the two segments (204t, 204k) are aligned with each other so that they are aligned.
    [2]
    Second end block assembly (100a, 700, 800) according to claim 1, wherein the two segments (204t, 204k) are materially interconnected.
    [3]
    The end block assembly (100a, 700, 800) of claim 1 or 2, further comprising: a housing (110) having an opening (110ο), said opening (110ο) forming said receiving area (102).
    [4]
    4. Endblockanordnung (100a, 700, 800) according to one of claims 1 to 3, further comprising: in the sleeve (204) inserted bearing unit having a bearing and a rotatably supported by the bearing shaft (202), wherein the rotatable mounted shaft (202) has the coupling region.
    [5]
    5. End block assembly (100a, 700, 800) according to claim 3 or 4, wherein a segment of the plurality of segments of the sleeve (204) has a mounting structure for releasably securing the sleeve (204) to the housing.
    [6]
    The end block assembly (100a, 700, 800) of any one of claims 1 to 5, wherein the two segments (204t, 204k) form a body of revolution, wherein the outer surfaces (214m, 224m) of the two segments (204t, 204k) are parallel to the axis of rotation run the body of revolution.
    [7]
    The end block assembly (100a, 700, 800) of any one of claims 1 to 6, wherein one segment of the two segments (204t, 204k) is formed from a first material and the other segment of the two segments (204t, 204k) is formed from a second one Material is formed; and wherein a fracture toughness of the first material is greater than a fracture toughness of the second material and / or wherein an electrical conductivity of the second material is greater than an electrical conductivity of the first material.
    [8]
    The end block assembly (100a, 700, 800) of any of claims 4 to 7, further comprising: an electrical first contact structure (802) for energizing the bearing assembly (200a, 600) with the sleeve inserted into the receiving portion (102) (204); The bearing assembly (200a, 600) having an electrical second contact structure (208) disposed in the sleeve (204) and electrically contacting the shaft; · Wherein the first contact structure (802) and the second contact structure (208) are arranged such that they form an electrically conductive connection when inserted into the sleeve (204) bearing unit.
    [9]
    9. Endblockanordnung (100a, 700, 800) according to one of claims 1 to 7, further comprising: a coolant supply (804) for supplying the bearing assembly (200a, 600) with coolant.
    [10]
    10. Processing arrangement (1200a, 1200b), comprising: a process chamber (1202) having a processing area (1000s); At least one end block arrangement (100a, 700, 800) attached to and / or in the process chamber according to one of claims 1 to 9; At least one tubular electrode (1030) coupled to the at least one end block assembly (100a, 700, 800) for processing a substrate (1020) in the processing region (1000s).
    [11]
    A bearing assembly (200a, 600) for rotatably supporting a tubular electrode, the bearing assembly (200a, 600) comprising: a coupling portion for coupling the tubular electrode; • a coupling portion supporting sleeve (204); Wherein the sleeve (204) is assembled from a plurality of segments whose outer surfaces form a lateral surface (204m) of the bearing assembly (200a, 600) and of which at least two segments (204t, 204k) are formed of different materials; • wherein the outer surfaces (214m, 224m) of the two segments (204t, 204k) are aligned with each other so that they are aligned.
    [12]
    12. A method of manufacturing a bearing assembly (200a, 600) for rotatably supporting a tubular electrode, the method comprising: • joining a plurality of segments to a sleeve (204) of the bearing assembly (200a, 600) whose outer surfaces have a shell surface (204m) of the bearing assembly (200a, 600) and of which at least two segments (204t, 204k) are formed of different materials; • Working the outer surface (204m) of the sleeve (204), so that the outer surfaces (214m, 224m) of the two segments (204t, 204k) are aligned.
    [13]
    13. The method according to claim 12, wherein the joining of at least the two segments (204t, 204k) takes place by a welding operation.
    [14]
    14. A method according to claim 12 or 13, inserting a bearing unit into the sleeve (204) having a bearing and a shaft rotatably supported by the bearing (202), the rotatably mounted shaft (202) the coupling portion for coupling the tubular electrode having.
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    同族专利:
    公开号 | 公开日
    CN205944032U|2017-02-08|
    US20160343550A1|2016-11-24|
    US10043643B2|2018-08-07|
    BE1023630A1|2017-05-19|
    DE102015107809B3|2016-07-28|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    DE102007049735A1|2006-10-17|2008-05-08|Von Ardenne Anlagentechnik Gmbh|Sputter cathode has co-located power supply and liquid coolant in block for high vacuum coating assembly|
    DE102009056241A1|2009-12-01|2011-06-09|Von Ardenne Anlagentechnik Gmbh|Support device for a magnetron arrangement with a rotating target|
    US20130008777A1|2010-03-31|2013-01-10|Mustang Vacuum Systems, Inc.|Cylindrical Rotating Magnetron Sputtering Cathode Device and Method of Depositing Material Using Radio Frequency Emissions|
    DE102012200564A1|2012-01-16|2013-07-18|Von Ardenne Anlagentechnik Gmbh|Drive and power supply device for rotatable cylindrical anode used for vacuum processing system, has rotary vacuum seal, power transmission device, torque transmission device and coolant supply device which are arranged in housing|
    CN107210571B|2015-02-16|2018-08-07|株式会社爱发科|Contact is for electric installation|
    法律状态:
    2018-12-07| FG| Patent granted|Effective date: 20170519 |
    2018-12-07| PD| Change of ownership|Owner name: VON ARDENNE ASSET GMBH & CO. KG; DE Free format text: DETAILS ASSIGNMENT: CHANGE OF OWNER(S), CESSION; FORMER OWNER NAME: VON ARDENNE GMBH Effective date: 20181011 |
    优先权:
    申请号 | 申请日 | 专利标题
    DE102015107809.0|2015-05-19|
    DE102015107809.0A|DE102015107809B3|2015-05-19|2015-05-19|End block assembly, processing assembly therewith, bearing assembly, and method of making a bearing assembly|
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